This document is the third sub-report of the EUV AIM design study being conducted at LLNL on behalf of International Sematech (ISMT). The purpose of this study as identified in section 1.2 of the statement of work is to research the basic user requirements of an actinic defect characterization tool, potential design configurations and top-level specifications. The objectives of this design study specifically identified in section 1.3 of the statement of work were to: (1) Determine the user requirements of an actinic defect characterization tool; (2) Determine if an EUV AIM tool is an appropriate platform for actinic defect characterization; (3) Determine possible design configurations and top-level performance specifications; (4) Identify potential technical issues and risks of different technical approaches; (5) Provide estimates of cost relating to different technical approaches; and (6) Provide simulated performance for key subsystems and the entire system. The sub-sections of the study to be addressed were accordingly defined in the statement of work as being: (1) Formulation of top-level specifications; (2) Identification of system configurations suitable for meeting the top-level specifications; (3) Preliminary design of imaging systems; (4) Preliminary design of illumination systems; (5) Prediction and comparison of performance through aerial image calculation; (6) Identification …

A laboratory investigation was undertaken to determine the effect of microbe generated gas bubbles in controlled, saturated sediment columns utilizing a novel technique involving acoustic wave propagation. Specifically, the effect of denitrifying bacteria on saturated flow conditions was evaluated in light of the stimulated production of N{sub 2} gas and the resulting plugging of the pore throats. The propagation of high frequency acoustic waves through the sediment columns was used to locate those regions in the column where gas accumulation occurred. Over a period of six weeks, regions of gas accumulation resulted in the attenuation of acoustic wave energies with the decreases in amplitude typically greater than one order of magnitude.