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HRTEM image simulations for the study of ultra-thin gate oxides (open access)

HRTEM image simulations for the study of ultra-thin gate oxides

We have performed high resolution transmission electron microscope (HRTEM) image simulations to qualitatively assess the visibility of various structural defects in ultra-thin gate oxides of MOSFET devices, and to quantitatively examine the accuracy of HRTEM in performing gate oxide metrology. Structural models contained crystalline defects embedded in an amorphous 16 {angstrom}-thick gate oxide. Simulated images were calculated for structures viewed in cross-section. Defect visibility was assessed as a function of specimen thickness and defect morphology, composition, size and orientation. Defect morphologies included asperities lying on the substrate surface, as well as ''bridging'' defects connecting the substrate to the gate electrode. Measurements of gate oxide thickness extracted from simulated images were compared to actual dimensions in the model structure to assess TEM accuracy for metrology. The effects of specimen tilt, specimen thickness, objective lens defocus and coefficient of spherical aberration (C{sub s}) on measurement accuracy were explored for nominal 10{angstrom} gate oxide thickness. Results from this work suggest that accurate metrology of ultra-thin gate oxides (i.e. limited to several per cent error) is feasible on a consistent basis only by using a C{sub s}-corrected microscope. However, fundamental limitations remain for characterizing defects in gate oxides using HRTEM, even with the new …
Date: July 17, 2001
Creator: Taylor, Seth T.; Mardinly, John & O'Keefe, Michael A.
System: The UNT Digital Library
Rate coefficients and mechanistic analysis for the reaction of hydroxyl radicals with 1,1-dichloroethylene and trans-1,2-dichloroethylene over an extended temperature range (open access)

Rate coefficients and mechanistic analysis for the reaction of hydroxyl radicals with 1,1-dichloroethylene and trans-1,2-dichloroethylene over an extended temperature range

Article on rate coefficients and mechanistic analysis for the reaction of hydroxyl radicals with 1,1-dichloroethylene and trans-1,2-dichloroethylene over an extended temperature range.
Date: July 17, 2001
Creator: Yamada, Takahiro; El-Sinawi, Abdulaziz; Siraj, Mohammad Masud, 1972-; Taylor, Philip H.; Peng, Jingping; Hu, Xiaohua et al.
System: The UNT Digital Library
Kinetic studies of the reaction of hydroxyl radicals with trichloroethylene and tetrachloroethylene (open access)

Kinetic studies of the reaction of hydroxyl radicals with trichloroethylene and tetrachloroethylene

Article on kinetic studies of the reaction of hydroxyl radicals with trichloroethylene and tetrachloroethylene.
Date: July 17, 2001
Creator: Tichenor, LeAnn B.; El-Sinawi, Abdulaziz; Yamada, Takahiro; Taylor, Philip H.; Peng, Jingping; Hu, Xiaohua et al.
System: The UNT Digital Library
A laser strain gauge for accelerator targets. (open access)

A laser strain gauge for accelerator targets.

Multi megawatt accelerators can deliver sufficient power to a target to destroy it in a few pulses. In order to look at the response of solid and liquid targets under these high power pulses, we are developing optical methods of measuring surface deformations with time resolutions limited by laser pulse lengths. These methods can be used to examine the surfaces of solids and liquids during elastic deformation and unstable hydrodynamic flows. We present preliminary results of a system designed for target tests using the Brookhaven AGS and the Argonne CHM linac.
Date: July 17, 2001
Creator: Hassanein, A. & Norem, J.
System: The UNT Digital Library
Experimental demonstration of two beam acceleration using dielectric step-up transformer. (open access)

Experimental demonstration of two beam acceleration using dielectric step-up transformer.

We report on the experimental results of the dielectric based two beam accelerator (step-up transformer). By using a single high charge beam, we have generated and extracted a high power RF pulse from a 7.8 GHz primary dielectric structure and then subsequently transferred to a second accelerating structure with higher dielectric constant and smaller transverse dimensions. We have measured the energy change of a second (witness) beam passing through the acceleration stage. The measured gradient is > 4 times the deceleration gradient. The detailed experiment of set-up and results of the measurements are discussed. Future plans for the development of a 100 MeV demonstration accelerator based on this technique is presented.
Date: July 17, 2001
Creator: Gai, W.; Conde, M. E.; Konecny, R.; Power, J. G.; Schoessow, P.; Simpson, J. et al.
System: The UNT Digital Library
An e{sup +}e{sup -} collider in the VLHC tunnel. (open access)

An e{sup +}e{sup -} collider in the VLHC tunnel.

None
Date: July 17, 2001
Creator: Barcikowski, A.; Goeppner, G.; Norem, J.; Rotela, E.; Rusthoven, B.; Sharma, S. et al.
System: The UNT Digital Library
Physics goals for the planned next linear collider engineering test facility. (open access)

Physics goals for the planned next linear collider engineering test facility.

The Next Linear Collider (NLC) Collaboration is planning to construct an Engineering Test Facility (ETF) at Fermilab. As presently envisioned, the ETF would comprise a fundamental unit of the NLC main linac to include X-band klystrons and modulators, a delay-line power-distribution system (DLDS), and NLC accelerating structures that serve as loads. The principal purpose of the ETF is to validate stable operation of the power-distribution system, first without beam, then with a beam having the NLC pulse structure. This paper concerns the possibility of configuring and using the ETF to accelerate beam with an NLC pulse structure, as well as of doing experiments to measure beam-induced wakefields in the rf structures and their influence back on the beam.
Date: July 17, 2001
Creator: Bohn, C.; Michelotti, L.; Ostiguy, J. F.; Syphers, M.; Bluem, H.; Todd, A. et al.
System: The UNT Digital Library
A hybrid dielectric and iris loaded periodic accelerating structure. (open access)

A hybrid dielectric and iris loaded periodic accelerating structure.

One disadvantage of conventional iris-loaded accelerating structures is the high ratio of the peak surface electric field to the peak axial electric field useful for accelerating a beam. Typically this ratio E{sub s}/E{sub a} {ge} 2. The high surface electric field relative to the accelerating gradient may prove to be a limitation for realizing technologies for very high gradient accelerators. In this paper, we present a scheme that uses a hybrid dielectric and iris loaded periodic structure to reduce E{sub s}/E{sub a} to near unity, while the shunt impedance per unit length r and the quality factor Q compare favorably with conventional metallic structures. The analysis based on MAFIA simulations of such structures shows that we can lower the peak surface electric field close to the accelerating gradient while maintaining high acceleration efficiency as measured by r/Q. Numerical examples of X-band hybrid accelerating structures are given.
Date: July 17, 2001
Creator: Zou, P.; Xiao, L.; Sun, X. & Gai, W.
System: The UNT Digital Library
Filler Materials for Polyphenylenesulphide Composite Coatings: Preprint (open access)

Filler Materials for Polyphenylenesulphide Composite Coatings: Preprint

Researchers at Brookhaven National Laboratory and the National Renewable Energy Laboratory have tested polymer-based coating systems to reduce the capital equipment and maintenance costs of heat exchangers in corrosive and fouling geothermal environments. These coating systems act as barriers to corrosion to protect low-cost carbon steel tubing; they are formulated to resist wear from hydroblasting and to have high thermal conductivity. Recently, new filler materials have been developed for coating systems that use polyphenylenesulphide as a matrix. These materials include boehmite crystals (orthorhombic aluminum hydroxide, which is grown in situ as a product of reaction with the geothermal fluid), which enhance wear and corrosion resistance, and carbon fibers, which improve mechanical, thermal, and corrosion-resistance properties of the composite.
Date: July 17, 2001
Creator: Sugama, T. & Gawlik, K.
System: The UNT Digital Library
Instrumentation for the muon based neutrino source. (open access)

Instrumentation for the muon based neutrino source.

There are a number of novel instrumentation issues relating to the generation cooling and acceleration of high power muon beams. Specific issues are monitoring the cooling water in the magnet nearest the target to minimize corrosion, monitoring the behavior of the target after the impact of the beam, and following the beam through the cooling accelerator chain. The muon cooling system also produces a number of unique issues such as making beam profile measurements in the presence of large backgrounds, measuring these backgrounds, losses, and the angular momentum of the beam. We describe the techniques we intend to use, and some of the constraints involved in their implementation.
Date: July 17, 2001
Creator: Norem, J.; Wang, C.-X. & Solomey, N.
System: The UNT Digital Library