Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities. (open access)

Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities.

Progress in MEMS fabrication has enabled a wide variety of force and displacement sensing devices to be constructed. One device under intense development at Sandia is a passive shock switch, described elsewhere (Mitchell 2008). A goal of all MEMS devices, including the shock switch, is to achieve a high degree of reliability. This, in turn, requires systematic methods for validating device performance during each iteration of design. Once a design is finalized, suitable tools are needed to provide quality assurance for manufactured devices. To ensure device performance, measurements on these devices must be traceable to NIST standards. In addition, accurate metrology of MEMS components is needed to validate mechanical models that are used to design devices to accelerate development and meet emerging needs. Progress towards a NIST-traceable calibration method is described for a next-generation, 2D Interfacial Force Microscope (IFM) for applications in MEMS metrology and qualification. Discussed are the results of screening several suitable calibration methods and the known sources of uncertainty in each method.
Date: October 1, 2009
Creator: Houston, Jack E.; Baker, Michael Sean; Crowson, Douglas A.; Mitchell, John Anthony & Moore, Nathan W.
System: The UNT Digital Library
Navy Attack Submarine Procurement: Background and Issues for Congress (open access)

Navy Attack Submarine Procurement: Background and Issues for Congress

This report discusses the Navy's proposed FY2009 budget, which requested $2,107.0 million to complete the procurement funding for an 11th Virginia-class (SSN-774) nuclear-powered attack submarine (SSN). This boat had already received $756.0 million in prior-year advance procurement funding.
Date: October 1, 2008
Creator: O'Rourke, Ronald
System: The UNT Digital Library
Navy LPD-17 Amphibious Ship Procurement: Background, Issues, and Options for Congress (open access)

Navy LPD-17 Amphibious Ship Procurement: Background, Issues, and Options for Congress

This report discusses the Navy's FY2009 shipbuilding plan that calls for procuring an 10th San Antonio (LPD-17) class amphibious ship in FY2011. This report discusses the procurement cost estimates of this ship, as well as related issues for Congress.
Date: October 1, 2008
Creator: O'Rourke, Ronald
System: The UNT Digital Library