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1,224 Matching Results
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Characterization of chemical bonding in low-k dielectric materialsfor interconnect isolation: a xas and eels study
The use of low dielectric constant materials in the on-chipinterconnect process reduces interconnect delay, power dissipation andcrosstalk noise. To achieve the requirements of the ITRS for 2007-2009minimal sidewall damage from etch, ash or cleans is required. In chemicalvapor deposited (CVD) organo-silicate glass (OSG) which are used asintermetal dielectric (IMD) materials the substitution of oxygen in SiO2by methyl groups (-CH3) reduces the permittivity significantly (from 4.0in SiO2 to 2.6-3.3 in the OSG), since the electronic polarizability islower for Si-C bonds than for Si-O bonds. However, plasma processing forresist stripping, trench etching and post-etch cleaning removes C and Hcontaining molecular groups from the near-surface layer of OSG.Therefore, compositional analysis and chemical bonding characterizationof structured IMD films with nanometer resolution is necessary forprocess optimization. OSG thin films as-deposited and after plasmatreatment are studied using X-ray absorption spectroscopy (XAS) andelectron energy loss spectroscopy (EELS). In both techniques, the finestructure near the C1s absorption or energy loss edge, respectively,allows to identify C-H, C-C, and C-O bonds. This gives the opportunity todifferentiate between individual low-k materials and their modifications.The O1s signal is less selective to individual bonds. XAS spectra havebeen recorded for non-patterned films and EELS spectra for patternedstructures. The chemical bonding is compared for as-deposited …
Date:
April 10, 2006
Creator:
Hoffmann, P.; Schmeisser, D.; Engelmann, H. J.; Zschech, E.; Stegmann, H.; Himpsel, F. et al.
Object Type:
Article
System:
The UNT Digital Library
Longitudinal double-spin asymmetry and cross section for inclusivejet production in polarized proton collisions at sqrt(s) = 200 GeV
We report a measurement of the longitudinal double-spinasymmetry A_LL and the differential cross section for inclusivemidrapidity jet production in polarized proton collisions at sqrt(s)=200GeV. The cross section data cover transverse momenta 5<pT<50GeV/c and agree with next-to-leading order perturbative QCD evaluations.The A_LL data cover 5<pT<17 GeV/c and disfavor at 98 percentC.L. maximal positive gluon polarization in the polarizednucleon.
Date:
August 10, 2006
Creator:
Abelev, B. I.; Adams, J.; Aggarwal, M. M.; Ahammed, Z.; Amonett, J.; Anderson, B. D. et al.
Object Type:
Article
System:
The UNT Digital Library
Transverse-momentum dependent modification of dynamic texture in central Au+Au collisions at sqrt(sNN) = 200 GeV
Correlations in the hadron distributions produced in relativistic Au+Au collisions are studied in the discrete wavelet expansion method. The analysis is performed in the space of pseudorapidity (|{eta}| {le} 1) and azimuth (full 2{pi}) in bins of transverse momentum (p{sub t}) from 0.14 {le} p{sub t} {le} 2.1 GeV/c. In peripheral Au+Au collisions a correlation structure ascribed to minijet fragmentation is observed. It evolves with collision centrality and p{sub t} in a way not seen before which suggests strong dissipation of minijet fragmentation in the longitudinally-expanding medium.
Date:
January 10, 2005
Creator:
Adams, J.; Aggarwal, M. M.; Ahammed, Z.; Amonett, J.; Anderson, B. D.; Arkhipkin, D. et al.
Object Type:
Article
System:
The UNT Digital Library
The STAR Time Project Chamber
Paper presented at the International Conference on Ultra-Relativistic Nucleus-Nucleus Collisions (1999) reporting on the progress of the STAR experiment, a complex system of many detector sub-systems which have been installed in a large solenoidal magnet at the Relativistic Heavy Ion Collider (RHIC).
Date:
May 10, 1999
Creator:
Argonne National Laboratory
Object Type:
Article
System:
The UNT Digital Library
The Lampasas Daily Leader. (Lampasas, Tex.), Vol. 8, No. 3132, Ed. 1 Wednesday, January 10, 1912
Daily newspaper from Lampasas, Texas that includes local, state, and national news along with advertising.
Date:
January 10, 1912
Creator:
Vernor, J. E.
Object Type:
Newspaper
System:
The Portal to Texas History
The Ranger (San Antonio, Tex.), Vol. 75, No. 18, Ed. 1 Friday, March 10, 2000
Weekly student newspaper from San Antonio College in San Antonio, Texas that includes campus news along with advertising.
Date:
March 10, 2000
Creator:
San Antonio College
Object Type:
Newspaper
System:
The Portal to Texas History
Brenham Banner-Press (Brenham, Tex.), Vol. 49, No. 293, Ed. 1 Friday, March 10, 1933
Daily newspaper from Brenham, Texas that includes local, state, and national news along with extensive advertising.
Date:
March 10, 1933
Creator:
Blake, T. C.
Object Type:
Newspaper
System:
The Portal to Texas History
The Lampasas Leader. (Lampasas, Tex.), Vol. 17, No. 16, Ed. 1 Friday, March 10, 1905
Weekly newspaper from Lampasas, Texas that includes local, state, and national news along with advertising.
Date:
March 10, 1905
Creator:
Vernor, J. E.
Object Type:
Newspaper
System:
The Portal to Texas History
Freie Presse für Texas. (San Antonio, Tex.), Vol. 15, No. 3169, Ed. 1 Monday, May 10, 1880
Daily German-language newspaper from San Antonio, Texas that includes local, state, and national news along with advertising.
Date:
May 10, 1880
Creator:
Hanschke, Robert
Object Type:
Newspaper
System:
The Portal to Texas History
Brenham Daily Banner. (Brenham, Tex.), Vol. 26, No. 161, Ed. 1 Wednesday, July 10, 1901
Daily newspaper from Brenham, Texas that includes local, state and national news along with extensive advertising.
Date:
July 10, 1901
Creator:
Rankin, John G.
Object Type:
Newspaper
System:
The Portal to Texas History
Brenham Evening Press. (Brenham, Tex.), Vol. 16, No. 94, Ed. 1 Friday, September 10, 1909
Daily newspaper from Brenham, Texas that includes local, state and national news along with extensive advertising.
Date:
September 10, 1909
Creator:
Tucker, George
Object Type:
Newspaper
System:
The Portal to Texas History
The Lampasas Daily Leader. (Lampasas, Tex.), Vol. 10, No. 160, Ed. 1 Wednesday, September 10, 1913
Daily newspaper from Lampasas, Texas that includes local, state, and national news along with advertising.
Date:
September 10, 1913
Creator:
Vernor, J. E.
Object Type:
Newspaper
System:
The Portal to Texas History
The Lampasas Daily Leader. (Lampasas, Tex.), Vol. 6, No. 1630, Ed. 1 Thursday, June 10, 1909
Daily newspaper from Lampasas, Texas that includes local, state, and national news along with advertising.
Date:
June 10, 1909
Creator:
Vernor, J. E.
Object Type:
Newspaper
System:
The Portal to Texas History
Brenham Banner-Press (Brenham, Tex.), Vol. 52, No. 13, Ed. 1 Wednesday, April 10, 1935
Daily newspaper from Brenham, Texas that includes local, state and national news along with extensive advertising.
Date:
April 10, 1935
Creator:
unknown
Object Type:
Newspaper
System:
The Portal to Texas History
Brenham Banner-Press (Brenham, Tex.), Vol. 49, No. 64, Ed. 1 Friday, June 10, 1932
Daily newspaper from Brenham, Texas that includes local, state and national news along with extensive advertising.
Date:
June 10, 1932
Creator:
Blake, T. C.
Object Type:
Newspaper
System:
The Portal to Texas History
Brenham Daily Banner-Press (Brenham, Tex.), Vol. 42, No. 218, Ed. 1 Thursday, December 10, 1925
Daily newspaper from Brenham, Texas that includes local, state, and national news along with extensive advertising.
Date:
December 10, 1925
Creator:
Robertson, Ruby
Object Type:
Newspaper
System:
The Portal to Texas History
Brenham Daily Banner-Press (Brenham, Tex.), Vol. 41, No. 89, Ed. 1 Thursday, July 10, 1924
Daily newspaper from Brenham, Texas that includes local, state, and national news along with extensive advertising.
Date:
July 10, 1924
Creator:
Robertson, Ruby
Object Type:
Newspaper
System:
The Portal to Texas History
The Lampasas Leader. (Lampasas, Tex.), Vol. 20, No. 21, Ed. 1 Friday, April 10, 1908
Weekly newspaper from Lampasas, Texas that includes local, state, and national news along with advertising.
Date:
April 10, 1908
Creator:
Vernor, J. E.
Object Type:
Newspaper
System:
The Portal to Texas History
The Prospector (El Paso, Tex.), Vol. 36, No. 46, Ed. 1 Tuesday, March 10, 1970
Semiweekly student newspaper from the University of Texas at El Paso that includes campus news and information along with advertising.
Date:
March 10, 1970
Creator:
University of Texas at El Paso
Object Type:
Newspaper
System:
The Portal to Texas History
The Rattler (San Antonio, Tex.), Vol. 15, No. 15, Ed. 1 Thursday, May 10, 1934
Semi-monthly student newspaper from St. Mary's University in San Antonio, Texas that includes campus news along with advertising.
Date:
May 10, 1934
Creator:
St. Mary's University (San Antonio, Tex.)
Object Type:
Newspaper
System:
The Portal to Texas History
The Lampasas Daily Leader. (Lampasas, Tex.), Vol. 7, No. 1862, Ed. 1 Thursday, March 10, 1910
Daily newspaper from Lampasas, Texas that includes local, state, and national news along with advertising.
Date:
March 10, 1910
Creator:
Vernor, J. E.
Object Type:
Newspaper
System:
The Portal to Texas History
The Lampasas Daily Leader. (Lampasas, Tex.), Vol. 6, No. 1603, Ed. 1 Monday, May 10, 1909
Daily newspaper from Lampasas, Texas that includes local, state, and national news along with advertising.
Date:
May 10, 1909
Creator:
Vernor, J. E.
Object Type:
Newspaper
System:
The Portal to Texas History
The Lampasas Daily Leader. (Lampasas, Tex.), Vol. 8, No. 2276, Ed. 1 Monday, July 10, 1911
Daily newspaper from Lampasas, Texas that includes local, state, and national news along with advertising.
Date:
July 10, 1911
Creator:
Vernor, J. E.
Object Type:
Newspaper
System:
The Portal to Texas History
The Lampasas Leader. (Lampasas, Tex.), Vol. 20, No. 8, Ed. 1 Friday, January 10, 1908
Weekly newspaper from Lampasas, Texas that includes local, state, and national news along with advertising.
Date:
January 10, 1908
Creator:
Vernor, J. E.
Object Type:
Newspaper
System:
The Portal to Texas History