This paper deals with various topics in micro electromechanical systems (MEMS) technology beginning with microactuation, MEMS processing, and MEMS design engineering. The fabrication and testing of three separate MEMS devices are described. The first two devices are a linear stepping motor and a continuous rotary motor, respectively; and were designed for the purpose of investigating the frictional and wear properties of silicon components. The third device is a bi-stable microrelay, in which electrical current conducts through a secondary circuit, via a novel probe-interconnect mechanism. The second half focuses on engineering a carbon nanotube / SU-8 photoepoxy nanocomposite for fabricating MEMS devices. A processing method for this material as well as the initial results of characterization, are discussed.

The current understanding of the mechanical properties and deformation behavior of some individual phases in titanium alloys is limited due to the fine scale at which these phases precipitate within the β-phase matrix. The α and ω phases represent the most widely observed phases in titanium alloys depending on the alloy composition and also the heat treatment procedure adopted during processing. The possibility of precipitating ω-phase depends on the content of the β-stabilizers within the system. Although a significant compositional partitioning occurs within ω-phase upon aging treatment, the knowledge of ω-phase mechanical properties as a function of composition is very limited. The initial part of the current work focuses on the effect of common β-stabilizers elements on the phase stability and mechanical properties of the ω-phase using first-principles calculations. A relation between the bonding nature, the phase stability, and elastic properties was proposed. Thereafter αʺ martensitic phase was investigated in Ti-Nb and Ti-Nb-O alloys. The phase stability and martensitic start temperature of αʺ-phase was studied as a function of Nb and oxygen content. Also, the effect of the lattice shear distortion induced by oxygen atom on stabilizing β-phase was investigated. Subsequently the effect of the β-stabilizers' elements on stacking faults …

The thermophysical properties and deformation behavior of a systematic series of model metallic glasses was investigated. For Zr-based metallic glasses with all metallic constituents, the activation energy of glass transition was determined to be in the range of 74-173 kJ/mol while the activation energy of crystallization was in the range of 155-170 kJ/mol. The reduced glass transition temperature was roughly the same for all the alloys (~ 0.6) while the supercooled liquid region was in the range of 100-150 K, indicating varying degree of thermal stability. In contrast, the metal-metalloid systems (such as Ni-Pd-P-B) showed relatively higher activation energy of crystallization from short range ordering in the form of triagonal prism clusters with strongly bonded metal-metalloid atomic pairs. Deformation mechanisms of all the alloys were investigated by uniaxial compression tests, strain rate sensitivity (SRS) measurements, and detailed characterization of the fracture surface morphology. For the metal-metal systems, plasticity was found to be directly correlated with shear transformation zone (STZ) size, with systems of larger STZ size showing better plasticity. In metal-metalloid amorphous alloys, plasticity was limited by the distribution of STZ units, with lower activation energy leading to more STZ units and better plasticity. The alloys with relatively higher plasticity …