Charge state dependence of L-shell x-ray production cross sections have been measured for 4-14 MeV ¹⁶O^q (q=3⁺-8⁺) ions incident on ultra-clean, ultra-thin copper, and for 12 MeV ¹⁶O^q (q=3⁺-8⁺) on nickel, zinc, gallium and germanium solid foils. L-shell x-ray production cross section were measured using target foils of thickness ≤0.6 μg/cm² evaporated onto 5 μg/cm² carbon backings. Oxygen ions at MeV energies and charge state q were produced using a 3MV 9SDH-2 National Electrostatics Corporation tandem Pelletron accelerator. Different charge states, with and without K-vacancies, were produced using a post acceleration nitrogen striping gas cell or ¹²C stripping foils. L-shell x-rays from ultra-thin ₂₈Ni, ₂₉Cu,₃₀Zn,₃₁Ga, and ₃₂Ge targets were measured using a Si(Li) x-ray detector with a FWHM resolution of 135 eV at 5.9 keV. The scattered projectiles were detected simultaneously by means of silicon surface barrier detectors at angle of 45° and 169° with respect to the beam direction. The electron capture (EC) as well as direct ionization (DI) contributions were determined from the projectile charge state dependence of the target x-ray production cross sections under single collision conditions. The present work was undertaken to expand the measurements of L-shell x-ray production cross sections upon selected elements with low …