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Micromachined pressure sensors: Review and recent developments (open access)

Micromachined pressure sensors: Review and recent developments

Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors have been widely produced. Micromachining technology has greatly benefited from the success of the integrated circuits industry, burrowing materials, processes, and toolsets. Because of this, microelectromechanical systems (MEMS) are now poised to capture large segments of existing sensor markets and to catalyze the development of new markets. Given the emerging importance of MEMS, it is instructive to review the history of micromachined pressure sensors, and to examine new developments in the field. Pressure sensors will be the focus of this paper, starting from metal diaphragm sensors with bonded silicon strain gauges, and moving to present developments of surface-micromachined, optical, resonant, and smart pressure sensors. Considerations for diaphragm design will be discussed in detail, as well as additional considerations for capacitive and piezoresistive devices.
Date: March 1, 1997
Creator: Eaton, W. P. & Smith, J. H.
System: The UNT Digital Library
An overview of micromachined platforms for thermal sensing and gas detection (open access)

An overview of micromachined platforms for thermal sensing and gas detection

Micromachined hotplates, membranes, filaments, and cantilevers have all been used as platforms for thermal sensing and gas detection. Compared with conventional devices, micromachined sensors are characterized by low power consumption, high sensitivity, and fast response time. Much of these gains can be attributed to the size reductions achieved by micromachining. In addition, micromachining permits easy, yet precise tailoring of the heat transfer characteristics of these devices. By simple alterations in device geometry and materials used, the relative magnitudes of radiation, convection and conduction losses and Joule heat gains can be adjusted, and in this way device response can be optimized for specific applications. The free-standing design of micromachined platforms, for example, reduces heat conduction losses to the substrate, thereby making them attractive as low power, fast-response heaters suitable for a number of applications. However, while micromachining solves some of the heat transfer problems typical of conventionally produced devices, it introduces some of its own. These trade-offs will be discussed in the context of several micromachined thermal and gas sensors present in the literature. These include micromachined flow sensors, gas thermal conductivity sensors, pressure sensors, uncooled IR sensors, metal-oxide and catalytic/calorimetric gas sensors. Recent results obtained for a microbridge-based catalytic/calorimetric gas …
Date: March 1, 1997
Creator: Manginell, R.P.; Smith, J.H. & Ricco, A.J.
System: The UNT Digital Library
Science into art: A study of the creative process (open access)

Science into art: A study of the creative process

Objective was to examine the creative process, demonstrated by 5 student participants in a class at the Art Center College of Design in Pasadena CA, from the germ of the creative idea through the final creative product. The students, drawn from classes sponsored by LLNL, were assigned the problem of representing ``big`` science, as practiced at LLNL, in a graphic, artistic, or multimedia product. As a result of this study, it was discovered that the process of creativity with these students was not linear in nature, nor did it strictly follow the traditional creativity 5-step schema of preparation, incubation, insight, evaluation, and elaboration. Of particular interest were several emergent themes of the creative process: spontaneous use of metaphor to describe the Laboratory; a general lack of interest in ``school`` science or mathematics by the American art students; a well developed sense of conscience; and finally, the symbolism inherent in the repeated use of a single artistic element. This use of the circle revealed a continuity of thinking and design perhaps related to the idealistic bias mentioned above.
Date: March 14, 1997
Creator: Marchant, M. & Sesko, S.C.
System: The UNT Digital Library
Post-crash fuel dispersal (open access)

Post-crash fuel dispersal

This paper is a brief overview of work over the last several decades in understanding what occurs to jet fuel stored in aircraft fuel tanks on impact with the ground. Fuel dispersal is discussed in terms of the overall crash dynamics process and impact regimes are identified. In a generic sense, the types of flow regimes which can occur are identified and general descriptions of the processes are given. Examples of engineering level tools, both computational and experimental, which have applicability to analyzing the complex environments are presented. Finally, risk based decision is discussed as a quick means of identifying requirements for development of preventative or mitigation strategies, such as further work on the development of an anti-misting agent.
Date: March 1, 1997
Creator: Tieszen, Sheldon R.
System: The UNT Digital Library