This article reviews some design considerations for the scaling down in size of instruments and machines with a primary aim to identify technologies that may provide more optimal performance solutions than those, often established, technologies used at macroscopic, or conventional, scales. Dimensional metrology within emerging applications will be considered for meso- through micro-down to nanometer level systems with particular emphasis on systems for which precision is directly related to function. In this paper, attention is limited to some of the more fundamental issues associated with scaling. For example, actuator work or power densities or the effect of noise on the sensor signals can be readily evaluated and provide some guidance in the selection for any given size of device. However, with reductions in scale these parameters and/or phenomena that limit performance may change. Within this review, the authors have tried to assess these complex inter-relationships between performance and scale, again from a fundamental perspective. In practice, it is likely that the nuances of implementation and integration of sensor, actuator and/or mechanism designs will determine functionality and commercial viability of any particular system development.